Description
Photodiode for VUV (Vacuum UV) detection
The S8553 is a VUV (Vacuum UV) photodiode suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, this photodiode offers more stable sensitivity even after long exposure to VUV radiation compared with conventional types.
Features
-Reliable detection improves of ArF excimer laser (λ=193 nm)
-Large photosensitive area: 18 × 18 mm
-Windowless package: 25.5 × 25.5 mm ceramic package
|
Photosensitive area |
18 × 18 mm |
|
Number of elements |
1 |
|
Package |
Ceramic |
|
Cooling |
Non-cooled |
|
Reverse voltage (max.) |
5 V |
|
Photosensitivity (typ.) |
0.06 A/W |
|
Dark current (max.) |
5000 pA |
|
Rise time (typ.) |
18 μs |
|
Terminal capacitance (typ.) |
8000 pF |
|
Measurement condition |
Typ. Ta=25 ℃, unless otherwise noted, Photosensitivity: λ=193 nm |
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